Palpatine getting the shaft was the best. I bet I know what Palpatine thought as he was falling. "I knew I should have let your *ss die on that hell hole of a planet."
I was a fan of all the deaths realy. Maul's was great. His last thought had to have been "Huh"
The death of Vader and Yoda were realy great and emotional. Very well done.
The look on Dooku's face when Palpatine tells Anakin to kill him is just priceless.
i like a few of them for different reasons. the whole scene where vader finally turns on the emperor is one of the best out of any movie, his death is a big sacrafice showing that good can overcome evil in the end and all that.
maces was awesome, and not just becuase i hate that guy. he thought hed beaten sidious and that he would save the republic he so loved. he finally trusted anakin (he told him that if he was right about palpatine hed have erned maces trust). then everything he thought was turned upside down. the republic he loved was being used by a sith, after finally trusting anakin he was stabbed in the back by him, and after hed seemingly exhausted the sith lord behind it all sidious sprang back and used the most powerful dark side attack to kill him. so everything hed ever believed was turned on its head just in time for him to see it before he died.
qui gons was cool becuase it was an action death, it wasnt a huge drawn out moment, he took a fairly weak hit to the face and took too long regaining his bearings and it cost him his life. one of the more real and surprising deaths of the whole saga.
palpatines was cool too, for the same reasons as vaders. the ultimate evil in the galaxy being defeated by good. not only did good defeat evil in vaders internal struggle for redemption, it ended up destroying the sith.
dookus was cool like maces and qui gons. a simple mistake and he lost the fight, and then everything hed believed was proven a lie just before the sabers cut into his throat.
overall id probably go with vader, but there are some really awesome ones throughout the saga.