This is the list I got them from. Note, that I was reading the list and searching for a bunch of these characters and Elrahprime seems to have it right so far. Not the order, but all the characters exist in the DCU. For the exception of Preacherverse.
7) Godlike Metahumans/1st class Metaphysicals, Semi-Abstract, God-Like beings, race, Demons, Angels/Metaphysicals that could affect the universe
Hamilton Benedict/Gemini Entity/Alexander Luthor/Gemworld Dimension (currently Amethyst's spirit)/Jonathan Kent/Progenitor (Element Lad reaching his full potential and becoming God of a galaxy)/Progenitor and Omnipagues (merged as one being)/The Promethian Giants/The Quantum Mechanics/The Anti-Matter Man (Pre-Boot)
Ramiel/Duma/Sandalphon/Archangel Amendaniel/Lord of Order (Shatru, St'ann, Terataya, Ynar, J'akk, Nabu the Wise, Patagones, Amethyst)/Lord of Chaos (Child, Gorrum, Hytuurnus, m'Shulla, Shivering Jemmy, The Weaver, T'Charr,The Shallow Brigade and the Laughing Dancers,The five original Lords of Chaos,Typhon, Vandaemon, Zanadu)/The Unity/Shattered God/SHAZAM's Elder Gods (Marzosh, Arel, Ribalvei, Voldar, Elbiam, Lumium)/S'ivaa The Destroyer/The Shadow Elements race/The Three Demons - Rath, Ghast, Abnegazar/Clockwerx/Trigon (in his dimension)/Krona/Bedlam/Dominus/Jakeem Thunder/Johnny Thunder/30th Century or present Mordru/The Great Darkness Saga Darkseid/Doctor Manhattan/Satan/Spear of Destiny/Azmodus (like the Spectre varies)/Shaitan/Shathan/Ultimate Man (fully evolved)/Ganthet possessed by Parallax/Superman Prime/Wonder Woman channeling the Godwave/Starbreaker/Yuga Khan/Imperiex/Brainiac 13/Fenris the Devourer/Omniphagues/Overmaster/Epoch/Vyronis/Preacherverse God/King of Tears/The Devil/Corinthian/The First of the Fallen/Saint of Killer/Angel of Death/Time Trapper I (Rokk Krinn)/Time Trapper II (Lori Morning?)/Glorith/Infinite Man/Timeless Ones/The Time Beast/Kulak/Eclipso (depowered and became Heart of Darkness)/Abraxis/Dr. Destiny/The Agents/Dark Angel/Zatanna and Adam (Godhead)/Agent If and the Realtor/The Carnivore (pre-God)/Cykroth/The Evil One/Maggedon/Alien Ator of the Timeless Place/Primordial Old Gods of Chaos/The Lords of Light/Nether-World Gods/Satan (Phantom Stranger issue pre-boot)/Willie Wisher/Father Time/Captain Skull/Cocoon of the Undying Ones
8) 1st Class Metahumans, supernatural, and aliens/2nd class Metaphysicals,Semi-Abstract, and God-Like beings/race/Demons/Angels
The Unimaginable/Unimaginable's race/Candlemaker/Egregores/TDHD MadGod of Sector 3600/Millinneum Giants/Cosmic Gamblers/OWner of the Earth/The A/Rift/Neron/The Second of the Fallen/The Third of the Fallen/The Endless One/Old Gods- Arzaz, Baaldur, Lokee, The Nameless One, Sirius, Wotan/A typical 5th dimensional imp (varies) (low showings)/The I/Luck Lords/X'Hal/Agamemno/The Aurakles/The One/The Fiend with Five Faces/Erishad's baby/Outer Gods (Shub-Niggurath, Azathoth, Yog-Sothoth, Nyarlathotep)/Elder Gods and the Old Ones (Cthulhu,M'Nagalah, k'zum'uggarth, Daemoniacus, Kolkothak, Koth-Shugoth, The Undying Ones and the N'Garai)/Netherworld Creatures/Andromeda and M'onel given powers by the Anomaly/The ID/The Miracle Machine/Parallax (Post Zero Hour)/Jericho (vessel of Azarath)/Zauriel (angel form)/Asmodel/Pax Dei host/Thrones/Saraphim/other angel host that Gabriel or Sandalphon are in charge of/Earth-Born Angels- Supergirl (angelic powers), Comet, and Blithe (if they actually use their powers), Twilight with Supergirl's Earth Born Angel Power (still has it I believe)/Jesse Custer/Genesis/The Light Entity/Leviathan (Phantom Stranger pre-boot)/Asmodeus/Oblivion II/Secret (full potential)
Sun Eater/Mr. Nebula/Cannibal Planet/Aquarius/Other Living Stars/Council of the Living Stars/Solaris/Morbiac the Zombie Star/The Vampire Sun/Mogo/Empire of Tears/Wonderworld inhabitors- Adam One, The Mote, and other Wonderworlders/Manhunter of Mars/Parliaments of Planets/Earth Elemental Swamp Thing/The Ancient Ones/Maya/Gaea
Monitor/Anti-Monitor (before he absorbed the multiverse)/Scarabus
